Ultraprecision consolidates the market position

The ultraprecision technology contains all processes in which bodies and surfaces with macroscopic measurements are prepared in extremely accurate form and smoothness. The main field of application of the ultra precision process is the creation of optical surfaces and ultra smooth wafers. We discuss about world market sales of up to 30 Billion EUR concerning these both product groups.

Especially in the optic and precision mechanics, processes are of high industrial relevance (e.g. for the projection-x-ray lithography) for any formed surfaces, adjustment procedures of polishing faults and optical-coating technologies, as well as developments of equipments for the sub-100nm-lithography and online-monitoring at the ultra precision processing.

• adjustment of polishing faults
• optics with nm- dimensional accuracy (aspherics, x-ray optical substrates, infrared optics, diffractive optics, laserglass)
• precision handling appliances

• Wafer grinding
• Wafer polishing

• Friction-less bearing
• Nm-positioning technology
• Ultraprecision technolgy - machines with high performance

Device and treatment process for nm-tolerances and nm-form precision (screw- , grinding and polishing machine).